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Ion-beam nano-patterning by using porous anodic alumina as a mask

Title
Ion-beam nano-patterning by using porous anodic alumina as a mask
Authors
신상원; 이성구; 이재용; 황정남; 이종한; 최인훈; 김태곤; 송종한
Issue Date
2005-07
Publisher
Nanotechnology
Citation
VOL 16, 1392-1395
URI
https://pubs.kist.re.kr/handle/201004/28520
ISSN
0957-4484
Appears in Collections:
KIST Publication > Article
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