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Fabrication of Nanoabrasive Grinding Wheels and Their Application to Grinding Silicon Wafers

Title: Fabrication of Nanoabrasive Grinding Wheels and Their Application to Grinding Silicon Wafers

Authors: 김태완; 현상훈; 김주선; 이종호; 이해원

Keywords: nanoabrasive; mechanochemical mixing; grinding wheel; vitrified bond; surface quality

Issue Date: 2006-08

Publisher: Key engineering materials

Citation: VOL 317-318, 373-376

URI: https://pubs.kist.re.kr/handle/201004/29170

ISSN: 1013-9826

Appears in Collections:: KIST Publication > Article

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