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Growth kinetics and oxidation behavior of WSi2 coating formed by chemical vapor deposition of Si on W substrate

Title: Growth kinetics and oxidation behavior of WSi2 coating formed by chemical vapor deposition of Si on W substrate

Authors: 윤진국; 이경환; 정성재; 손인진; 도정만; 김긍호

Keywords: WSi2 coating; chemcial vapor deposition; growth kinetics and oxidation

Issue Date: 2006-06

Publisher: Journal of alloys and compounds

Citation: VOL 420, 199-206

URI: https://pubs.kist.re.kr/handle/201004/29270

ISSN: 0925-8388

Appears in Collections:: KIST Publication > Article

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