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Ion Transmittance of Anodic For Ion Beam Nano-patterning

Title
Ion Transmittance of Anodic For Ion Beam Nano-patterning
Authors
신상원; 이종한; 이성구; 이재용; 황정남; 최인훈; 이관희; 정원용; 문현찬; 김태곤; 송종한
Keywords
anodic alumina; nano-patterning; ion-beam; transmittance
Issue Date
2006-01
Publisher
한국진공학회지 (Journal of the Korean Vacuum Society)
Citation
VOL 15, NO 1, 97-102
URI
https://pubs.kist.re.kr/handle/201004/29750
ISSN
12258822
Appears in Collections:
KIST Publication > Article
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