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Effect Of Silicon Carbide Passivation Films On The Resonance Characteristics Of Cantilever Sensor

Title
Effect Of Silicon Carbide Passivation Films On The Resonance Characteristics Of Cantilever Sensor
Authors
최기용; 최덕균; 최두진; 윤대성; 김태송
Keywords
SiC; passivation
Issue Date
2006-04
Publisher
ISIF 2006
URI
https://pubs.kist.re.kr/handle/201004/30632
Appears in Collections:
KIST Publication > Conference Paper
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