A micromachined reaction force actuator (RFA) for a nanomanipulator preparation
- A micromachined reaction force actuator (RFA) for a nanomanipulator preparation
- Il-Han Hwang; 윤의성; Jong-Hyun Lee
- Interferometer; microelectromechanical systems (MEMS); microactuator; nanostep; reaction force
- Issue Date
- Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
- VOL 15, NO 3, 492-497
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- KIST Publication > Article
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