DSpace at KISTKIST PublicationArticle

A micromachined reaction force actuator (RFA) for a nanomanipulator preparation

Title
A micromachined reaction force actuator (RFA) for a nanomanipulator preparation
Authors
Il-Han Hwang; 윤의성; Jong-Hyun Lee
Keywords
Interferometer; microelectromechanical systems (MEMS); microactuator; nanostep; reaction force
Issue Date
2006-06
Publisher
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
Citation
VOL 15, NO 3, 492-497
URI
https://pubs.kist.re.kr/handle/201004/30819
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE