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Low temperature O2 plasma-assisted wafer bonding of InP and a garnet crystal for an optical waveguide isolator

Title: Low temperature O2 plasma-assisted wafer bonding of InP and a garnet crystal for an optical waveguide isolator

Authors: 노종욱; 양정수; 옥성해; 우덕하; 변영태; 전영민; T. Mizumoto; 이우영; 이석

Keywords: wafer bonding; hydrophilic surface; plasma surface activation; optical waveguide isolator; garnets

Issue Date: 2007-06

Publisher: Solid state phenomena

Citation: VOL 124-126, 475-478

URI: https://pubs.kist.re.kr/handle/201004/32113

ISSN: 10120394

Appears in Collections:: KIST Publication > Article

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