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Electrical properties of Sol-infiltrated PCW-PZT thick films on SiC thick films

Title
Electrical properties of Sol-infiltrated PCW-PZT thick films on SiC thick films
Authors
최기용; 최덕균; 김태송
Keywords
piezoelectric; MEMS; SiC; PZT; thick film; sol
Issue Date
2007-06
Publisher
Journal of ceramic processing research / International organization for ceramic processing
Citation
VOL 8, NO 2, 156-160
URI
https://pubs.kist.re.kr/handle/201004/32615
ISSN
1229-9162
Appears in Collections:
KIST Publication > Article
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