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Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina

Title: Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina

Authors: 정미; 이석; 변영태; 전영민; 김선호; 우덕하; 모선일

Keywords: InP nanohole; ICP-RIE; Photoluminescence

Issue Date: 2008-04

Publisher: Microelectronics journal

Citation: VOL 39, NO 3-4, 526-528

URI: https://pubs.kist.re.kr/handle/201004/33890

ISSN: 0026-2692

Appears in Collections:: KIST Publication > Article

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