Ellipsometric analysis of porous anodized aluminum oxide &#64257

Title
Ellipsometric analysis of porous anodized aluminum oxide fi lms

Title
lms
Authors
정용우변지섭우덕하김영동
Keywords
Ellipsometry; Anodized aluminum oxide; Optical properties; Anisotropy; nano
Issue Date
2009-05
Publisher
Thin solid films
Citation
VOL 517, NO 13, 3726-3730
Abstract
We performed an ellipsometric study of porous anodized aluminum oxide (AAO) films on Si substrates. Regular cylindrical porous AAO films with flat bottom structure were formed by chemical etching and anodization. The data showed typical interference oscillations as a result of the transparent characteristics of the film throughout the visible spectral range.We applied a combined effectivemediumapproximationmodelwith anisotropicmodel to obtain optical properties of the films, which can be used as basic information applicable for more complex structures.
URI
https://pubs.kist.re.kr/handle/201004/35178
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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