Dependence of Processing Parameters on Structural Properties and Microstructures of Pulsed Laser Deposited LiMn2O4 Thin Films

Abstract

LiMn2O4 thin films grown on a Pt/Ti/SiO2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target–substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery.