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Study on the change of performance of a-IGZO TFTs doping on processing parameters

Title
Study on the change of performance of a-IGZO TFTs doping on processing parameters
Authors
이상렬; 정유진; 조경철; 이재상
Issue Date
2009-11
Publisher
한국전기전자재료학회(추계학술대회)
URI
https://pubs.kist.re.kr/handle/201004/36720
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KIST Publication > Conference Paper
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