Carrier-suppressing effect of scandium in InZnO systems for solution-processed thin film transistors

Title
Carrier-suppressing effect of scandium in InZnO systems for solution-processed thin film transistors
Authors
최유리김건희정웅희배정현김현재홍재민유재웅
Keywords
TFT; scandium; carrier; solution process
Issue Date
2010-10
Publisher
Applied physics letters
Citation
VOL 97, NO 16, 162102-1-162102-3
Abstract
The carrier-suppressing effect of Sc in InZnO systems was studied using thin-film transistors (TFTs) with a sol-gel processed active channel. As the amount of Sc content increased, the off current decreased, and the threshold voltage shifted to a positive bias region. The Sc effectively controlled the oxygen vacancies and supplied free electrons. X-ray photoelectron spectroscopy (XPS) verified that the vacancy-related oxygen 1s peak decreased with increasing Sc content. The TFT performance with 14% Sc showed that a field-effect mobility and on-off ratio were 2.06 cm2/V s and 8.02×106, respectively.
URI
https://pubs.kist.re.kr/handle/201004/38191
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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