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Annealing effect on the optical and electrical characteristic of a-IGZO thin films transistor

Title: Annealing effect on the optical and electrical characteristic of a-IGZO thin films transistor

Authors: 김종우; 최원국; 주병권; 이전국

Keywords: InGaZnOx; thin film transistor; annealing; optical properties

Issue Date: 2010-05

Publisher: 한국재료학회 춘계 학술발표대회

URI: https://pubs.kist.re.kr/handle/201004/38702

Appears in Collections:: KIST Publication > Conference Paper

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