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Enhancement of electrical properties in Al-doped ZnO films by turning dc bias voltage during radio frequency magnetron sputtering

Title
Enhancement of electrical properties in Al-doped ZnO films by turning dc bias voltage during radio frequency magnetron sputtering
Authors
노영수; 박동희; 김태완; 최지원; 바사바라 안가디; 최원국
Keywords
Structural property; Optical property; Al-doped ZnO; Electrodeposition
Issue Date
2011-10
Publisher
International Symposium on Transparent Conductive Coatings
URI
https://pubs.kist.re.kr/handle/201004/41085
Appears in Collections:
KIST Publication > Conference Paper
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