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Characteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron

Title: Characteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron

Authors: 박동희; 양정도; 최지원; 최원국

Keywords: Zinc Oxide; Transparent conducting oxide; HIPIMS

Issue Date: 2011-10

Publisher: International Symposium on Transparent Conductive Coatings

URI: https://pubs.kist.re.kr/handle/201004/41086

Appears in Collections:: KIST Publication > Conference Paper

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