Fabrication of Plasmonic Nanodiscs by Photonic Nanojet Lithography

Abstract

In this study, we present and demonstrate a new route to the fabrication of plasmonic nanostructures with a controlled size and shape using photonic nanojet lithography. Through the approach of dual-layer lift-off, the achievable size was remarkably reduced to a sub-100 nm scale and the introduction of an engineered diffuser was proved to give a facile and precise way of controlling the anisotropy in shape without a process burden even when the spherical focusing beads are used. # 2012 The Japan Society of Applied Physics