Lithography-free centimeter-long nanochannel fabrication method using an electrospun nanofiber array
- Title
- Lithography-free centimeter-long nanochannel fabrication method using an electrospun nanofiber array
- Authors
- 박석희; 신현준; 김용환; 양동열; 이종철; 이상엽
- Issue Date
- 2012-09
- Publisher
- Journal of micromechanics and microengineering
- Citation
- VOL 22, NO 9, 095019-1-095019-9
- Abstract
- Novel cost-effective methods for polymeric and metallic nanochannel fabrication have been
demonstrated using an electrospun nanofiber array. Like other electrospun nanofiber-based
nanofabrication methods, our system also showed high throughput as well as cost-effective
performances. Unlike other systems, however, our fabrication scheme provides a
pseudo-parallel nanofiber array a few centimeters long at a speed of several tens of fibers per
second based on our unique inclined-gap fiber collecting system. Pseudo-parallel nanofiber
arrays were used either directly for the PDMS molding process or for the metal lift-off process
followed by the SiO2 deposition process to produce the nanochannel array. While the PDMS
molding process was a simple fabrication based on one-step casting, the metal lift-off process
followed by SiO2 deposition allowed finetuning on height and width of nanogrooves down to
subhundred nanometers from a few micrometers. Nanogrooves were covered either with cover
glass or with PDMS slab and nanochannel connectivity was investigated with a fluorescent
dye. Also, nanochannel arrays were used to investigate mobility and conformations of λ-DNA.
- URI
- https://pubs.kist.re.kr/handle/201004/43201
- ISSN
- 09601317
- Appears in Collections:
- KIST Publication > Article
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