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Metalorganic chemical vapor deposition of TiO2:N anatase thin film on Si substrate

Title
Metalorganic chemical vapor deposition of TiO2:N anatase thin film on Si substrate
Authors
이동헌; 조용수; 이월인; 김태송; 이전국; 정형진
Keywords
chemical vapor deposition; TiO2; anatase; X-ray photoelectron spectroscopy
Issue Date
1995-02
Publisher
Applied physics letters
Citation
VOL 66, NO 7, 815-816
URI
https://pubs.kist.re.kr/handle/201004/47756
ISSN
00036951
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KIST Publication > Article
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