Facile fabrication of YSZ/GDC multi-layers by using a split target in pulsed laser deposition and their structural and electrical properties

Title
Facile fabrication of YSZ/GDC multi-layers by using a split target in pulsed laser deposition and their structural and electrical properties
Authors
박정훈홍완식이종호윤경중김형철홍종섭송휴섭손지원
Keywords
multi-layer thin films; pulsed laser deposition; split target; YSZ; GDC
Issue Date
2014-10
Publisher
Journal of electroceramics
Citation
VOL 33, NO 1-2, 25-30
Abstract
Various configurations of the multi-layer of yttriastabilized zirconia (YSZ) and gadolinia-doped ceria (GDC) are successfully fabricated through a novel method by means of pulsed laser deposition (PLD) utilizing a split target. By controlling the deposition conditions like the laser frequency and target configuration, YSZ/GDC multi-layers of different periodicities and YSZ/GDC thickness ratios can be easily and simply realized. The multi-layer fabricated by the proposed method exhibits nearly identical physical and electrical properties to those of the multi-layer films by the conventional layer-by-layer deposition method. The present study provides a facile and effective fabrication method for the design and application of multi-layered structure.
URI
https://pubs.kist.re.kr/handle/201004/48938
ISSN
13853449
Appears in Collections:
KIST Publication > Article
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