MEMS NEURAL PROBE ARRAY FOR MULTIPLE-SITE OPTICAL STIMULATION WITH LOW-LOSS OPTICAL WAVEGUIDE BY USING THICK GLASS CLADDING LAYER
- MEMS NEURAL PROBE ARRAY FOR MULTIPLE-SITE OPTICAL STIMULATION WITH LOW-LOSS OPTICAL WAVEGUIDE BY USING THICK GLASS CLADDING LAYER
- 손유진; 이현주; 김도희; 김윤경; 윤의성; 강지윤; 최낙원; 김태근; 조일주
- Issue Date
- IEEE MEMS Conference
- , 853-856
- We present a MEMS neural probe array for multiple-site
optical stimulation with low-loss SU-8 optical waveguides.
An embedded 20-μm-thick cladding layer was formed by
glass reflow process; due to this embedded structure, no
additional thickness was required. In addition, optical loss
was reduced by using the thick cladding layer and integrating
a thick SU-8 layer as a core layer. The low-loss optical
waveguide enables multiple-site stimulation with two-step
optical splitters. Using the presented probe array, we also
demonstrate a successful in-vivo optical stimulation through
recording of neural signals from the hippocampus of a
transgenic ChR2-YFP mouse. Recorded neural signals were
synchronized with light pulses, which confirms that neurons
were successfully stimulated by the blue light and the
integrated electrode array successfully recorded the neural
signals from activated neurons.
- Appears in Collections:
- KIST Publication > Conference Paper
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.