MEMS NEURAL PROBE ARRAY FOR MULTIPLE-SITE OPTICAL STIMULATION WITH LOW-LOSS OPTICAL WAVEGUIDE BY USING THICK GLASS CLADDING LAYER

Title
MEMS NEURAL PROBE ARRAY FOR MULTIPLE-SITE OPTICAL STIMULATION WITH LOW-LOSS OPTICAL WAVEGUIDE BY USING THICK GLASS CLADDING LAYER
Authors
손유진이현주김도희김윤경윤의성강지윤최낙원김태근조일주
Issue Date
2014-01
Publisher
IEEE MEMS Conference
Citation
, 853-856
Abstract
We present a MEMS neural probe array for multiple-site optical stimulation with low-loss SU-8 optical waveguides. An embedded 20-μm-thick cladding layer was formed by glass reflow process; due to this embedded structure, no additional thickness was required. In addition, optical loss was reduced by using the thick cladding layer and integrating a thick SU-8 layer as a core layer. The low-loss optical waveguide enables multiple-site stimulation with two-step optical splitters. Using the presented probe array, we also demonstrate a successful in-vivo optical stimulation through recording of neural signals from the hippocampus of a transgenic ChR2-YFP mouse. Recorded neural signals were synchronized with light pulses, which confirms that neurons were successfully stimulated by the blue light and the integrated electrode array successfully recorded the neural signals from activated neurons.
URI
https://pubs.kist.re.kr/handle/201004/49076
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE