Fabrication of Large-area Multi-scale-architectured Thin-Film SOFC via Commercially Viable Thin-film Technology

Abstract

The feasibility of realizing large-area multi-scale-architectured thin-film solid oxide fuel cell (TF-SOFC) by using commercially viable thin-film technology, sputtering in the present study, is investigated. By using a 2-inch sputtering system, the multi-scalearchitectured platform consisting of a nanostructure NiO-yttriastabilized zirconia (YSZ) interlayer and an ultra-thin YSZ electrolyte is successfully fabricated over a 5 cm by 5 cm NiOYSZ anode support. An open circuit voltage of 1.1 V and a peak power density exceeding 1 Wcm-2 are obtained; thus the total power output from the cell reaches 16 W at 600oC. The present study demonstrates the possibility of transferring the multi-scalearchitectured TF-SOFC technology to the industrial sector using commercial thin-film technologies