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Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation

Title
Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation
Authors
김용태; 전영민; 문병혁; Yong Soo Kim; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju
Keywords
EUV; High Harmonic Generation; Mask Inspection
Issue Date
2016-11
Publisher
International Microprocesses and Nanotechnology Conference 2016
Citation
VOL 11P-11-1
URI
https://pubs.kist.re.kr/handle/201004/64676
Appears in Collections:
KIST Publication > Conference Paper
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