Future of dynamic random-access memory as main memory
- Future of dynamic random-access memory as main memory
- 김성근; Mihaela Popovici
- DRAM; capacitor; ALD; transistor; dielectric; electrode
- Issue Date
- MRS bulletin
- VOL 43, NO 5-339
- Dynamic random-access memory (DRAM) is the main memory in most current computers.
The excellent scalability of DRAM has signifi cantly contributed to the development of modern
computers. However, DRAM technology now faces critical challenges associated with further
scaling toward the ∼ 10-nm technology node. This scaling will likely end soon because of the
inherent limitations of charge-based memory. Much effort has been dedicated to delaying
this. Novel cell architectures have been designed to reduce the cell area, and new materials
and process technologies have been extensively investigated, especially for dielectrics and
electrodes related to charge storage. In this article, the current issues, recent progress in and
the future of DRAM materials, and fabrication technologies are discussed.
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