Lowloss aluminium nitride thin film for midinfrared microphotonics
- Lowloss aluminium nitride thin film for midinfrared microphotonics
- 정호중; Pao Tai Lin; Lionel C. Kimerling; Anu Agarwal; Hong X. Tang
- Issue Date
- Laser & photonics review
- VOL 8, NO 2-L28
- Mid-infrared (mid-IR) microphotonic devices including (i) straight/bent waveguides and (ii) Y-junction beam splitters are developed on thin films of CMOS-compatible sputter deposited aluminum nitride (AlN)-on-silicon. An optical loss of 0.83 dB/cm at = 2.5 mu m is achieved. In addition, an efficient mid-IR 50:50 beam splitter is demonstrated over 200nm spectral bandwidth along with a <2% power difference between adjacent channels. With the inherent advantage of an ultra-wide transparent window (ultraviolent to mid-IR), our AlN mid-IR platform can enable broadband optical networks on a chip.
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