Electrowetting on a polymer microlens array
- Electrowetting on a polymer microlens array
- 임매순; 김동한; 이주형; 윤준보; 최양규
- Issue Date
- VOL 26, NO 14-12447
- This paper reports on the electrowetting behavior of a flexible poly(dimethylsiloxane) (PDMS) microlens array. A Cr and Au double-layered electrode was formed on an array of microlenses with diameters of 10 μm and heights of 13 μm. A deposition of parylene and a coating of Teflon were followed for electrical insulation as well as for enhancement of the hydrophobicity. On the nearly superhydrophobic microlens array surface, the electrowetting of a deionized water droplet was observed over the contact angle range of ∼140° to ∼58° by applying 0− 200 V, respectively. The electrowetting phenomenon was reversible even in air environment with applied voltages of less than 100 V. The electrowetting on the microlens array surface lost its reversibility after the microlens array surface was completely wetted when the water meniscus touched the bottom of the microlens array. Analysis of meniscus shapes and net force direction follows to elucidate the reversibility. The convex curvature of the microlens caused gradual rather than abrupt impalement of water into the gap among the microlenses.
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