Wide-temperature (up to 100 °C) operation of thermostable vanadium oxide based microbolometers with Ti/MgF2 infrared absorbing layer for long wavelength infrared (LWIR) detection
- Wide-temperature (up to 100 °C) operation of thermostable vanadium oxide based microbolometers with Ti/MgF2 infrared absorbing layer for long wavelength infrared (LWIR) detection
- 최원준; 백승협; 최형진; 이혜진; 길태현; 왕다솜; 김태형; 정대한; 이기석; 윤의준; 백정민
- Issue Date
- Applied surface science
- VOL 547, 149142
- A strategy for a microbolometer operating over a wide range of temperatures up to 100 °C with low nonlinearity and without hysteresis is described, based on a thermally stable VO2(B) film and 5-stack Ti/MgF2 infrared (IR) absorbers. The highly crystalline VO2(B) film formed on an amorphous SrTiO3 layer shows a high temperature coefficient of resistivity and low resistivity without any significant changes up to 100 °C. No significant changes are observed in the two values even after keeping the film at 100 °C for over a month. This outstanding thermostability makes the microbolometers with and without the IR absorber easily capable of operating up to 100 °C. The microbolometers with the 5-stack Ti/MgF2 IR absorber also shows increases in its responsivity by 4 times at 20 °C and by 3 times at 100 °C compared to that without IR absorber due to the increase of IR absorption. These results are achieved without significant increase in the thermal time constants even with the introduction of thermally massive IR absorber.
- Appears in Collections:
- KIST Publication > Article
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.