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Fabrication processes and problems of microelectromechanical system devices based on piezoelectric PZT film and surface micromachining techniques

Title
Fabrication processes and problems of microelectromechanical system devices based on piezoelectric PZT film and surface micromachining techniques
Authors
윤영수
Issue Date
1997-01
Publisher
Ceramic technique.
Citation
VOL 12, 364-?
URI
https://pubs.kist.re.kr/handle/201004/7609
Appears in Collections:
KIST Publication > Article
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