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Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips.

Title
Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips.
Authors
이상조; 주병권; 이윤희; 오명환; 전동렬; C. G. Ko
Keywords
field emitter; carbon; electron field emission; oxidation; plasma CVD coatings; semiconductor technology; silicon; sputter etching; vacuum microelectronics
Issue Date
1996-07
Publisher
Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
Citation
, 193-196
URI
https://pubs.kist.re.kr/handle/201004/7619
Appears in Collections:
KIST Publication > Conference Paper
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