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Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating

Title
Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating
Authors
정재훈; 주병권; 이윤희; 오명환; 장진
Keywords
field emitter; carbon; electron field emission; molybdenum; plasma CVD coatings; vacuum microelectronics; DLC-coated metal tip
Issue Date
1996-12
Publisher
IEEE international electron devices meeting (IEDM '96), San Francisco, USA.
Citation
, ?-?
URI
https://pubs.kist.re.kr/handle/201004/7645
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KIST Publication > Conference Paper
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