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dc.contributor.author편정준-
dc.contributor.author조철진-
dc.contributor.author김상태-
dc.contributor.author정두석-
dc.contributor.author김성근-
dc.contributor.author강종윤-
dc.contributor.author최지원-
dc.contributor.author김진상-
dc.contributor.author백승협-
dc.date.accessioned2024-01-12T03:34:36Z-
dc.date.available2024-01-12T03:34:36Z-
dc.date.issued2018-08-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76843-
dc.title반도체 메모리 소자용 금속 전극 제조방법-
dc.typePatent-
dc.date.registration2018-08-28-
dc.date.application2017-07-13-
dc.identifier.patentRegistrationNumber10062699-
dc.identifier.patentApplicationNumber15/648770-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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