나노크기의 주상입자 조직을 갖는 초경도 탄화규소 박막

Author
백영준이욱성박종극
Assignee
한국과학기술연구원
Regitration Date
2015-12-01
Registration No.
10-1575103
Application Date
2014-11-20
Application No.
2014-0162457
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/77005
Appears in Collections:
KIST Patent > Others
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