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다중 가스셀 모듈을 이용한 극자외선 빔 생성장치

Author

전영민; 김용수; 안준모; 서민아; 우덕하; 박민철; 변영태; 김철기; 이석; 김재헌

Assignee

한국과학기술연구원

Regitration Date

2017-12-12

Registration No.

9844125

Application Date

2015-12-28

Application No.

14/979729

Country

US

URI

https://pubs.kist.re.kr/handle/201004/77021

Appears in Collections:

KIST Patent > Others

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