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Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100)

Title
Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100)
Authors
D.Y.C. Lie; N.D. Theodore; 송종한; M.-A. Nicolet
Issue Date
1995-05
Publisher
Journal of Applied Physics
Citation
VOL 77, NO 10, 5160-5166
URI
https://pubs.kist.re.kr/handle/201004/7714
ISSN
0021-8979
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KIST Publication > Article
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