Capacitance Matching for a Non-volatile Hybrid SIS Optical Phase Shifter with a Ferroelectric Capacitor

Abstract

We investigated the feasibility of the non-volatile operation of the III-V/Si hybrid SIS optical phase shifter with the series connection of a ferroelectric HZO capacitor. Thanks to ferroelectric polarization, non-volatile effective refractive index change can memorize the resonance or interference wavelength under zero bias.