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X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation

Title: X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation

Authors: 최원국; 고석근; 정형진

Keywords: X-ray photoelectron spectroscopy; Al2O3; SiO2; Si3N4; low energy reactive ion beam irradiation

Issue Date: 1999-11

Publisher: Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society

Citation: VOL 17, NO 6, 3362-3367

URI: https://pubs.kist.re.kr/handle/201004/7753

ISSN: 0734-2101

Appears in Collections:: KIST Publication > Article

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