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dc.contributor.author한승희-
dc.contributor.author변지영-
dc.contributor.author석현광-
dc.contributor.author신상범-
dc.contributor.author김유찬-
dc.contributor.author이성배-
dc.contributor.author최진영-
dc.contributor.author한준현-
dc.date.accessioned2024-01-12T04:06:03Z-
dc.date.available2024-01-12T04:06:03Z-
dc.date.issued2011-08-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/77679-
dc.title고체 원소 플라즈마 이온주입 방법 및 장치-
dc.typePatent-
dc.date.registration2011-08-02-
dc.date.application2009-01-14-
dc.identifier.patentRegistrationNumber10-1055396-
dc.identifier.patentApplicationNumber10-2009-0002986-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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