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Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage

Title
Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage
Authors
송재훈; 최덕균; 최원국
Keywords
gas cluster; cluster ion impact; surgace smoothing; sputtering; surface embossment; hillocks; surface migration
Issue Date
2002-11
Publisher
Nuclear Instruments and Methods in Physics Research B
Citation
VOL 196, NO 3-4, 268-274
URI
https://pubs.kist.re.kr/handle/201004/7770
ISSN
0168-583X
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KIST Publication > Article
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