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다공질실리콘 표면의 기체반응에 대한 전기특성 .

Title
다공질실리콘 표면의 기체반응에 대한 전기특성 .
Authors
김은규; 민석기; 유종훈
Keywords
다공질실리콘
Issue Date
1997-03
Publisher
응용물리 .
Citation
v. 10, no. 2, 159-164
URI
https://pubs.kist.re.kr/handle/201004/7792
Appears in Collections:
KIST Publication > Article
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