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dc.contributor.author이전국-
dc.contributor.author정규호-
dc.contributor.author이재갑-
dc.date.accessioned2024-01-12T04:32:28Z-
dc.date.available2024-01-12T04:32:28Z-
dc.date.issued2008-03-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78064-
dc.title플라즈마 포커스 장치를 사용한 물질 증착 방법 및 플라즈마 포커스-RF 스퍼터링 복합 장치-
dc.typePatent-
dc.date.registration2008-03-04-
dc.date.application2007-02-12-
dc.identifier.patentRegistrationNumber10-0812358-
dc.identifier.patentApplicationNumber2007-0014546-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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