KIST Library Institutional Repository

대출력 펄스 RF 플라즈마를 이용한 매몰 절연막 제조장치 및 제조방법

Author

한승희; 김영우; 이연희

Assignee

한국과학기술연구원

Regitration Date

2006-04-26

Registration No.

576194

Application Date

2004-12-07

Application No.

2004-0102291

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78108

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML