KIST Library Institutional Repository

화학증착장치용　히터

Author

민석기; 김용; 김성일; 김무성

Assignee

한국과학기술연구원

Regitration Date

1997-08-26

Registration No.

121333

Application Date

1994-04-27

Application No.

94-9004

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78729

Appears in Collections:

KIST Patent > Others

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