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Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxid thin films.

Title: Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxid thin films.

Authors: 나종갑; Y. R. Cho; Y. H. Kim; T. D. Lee; S. J. Park

Keywords: indium oxide; sputtering; electrical property; optical property

Issue Date: 1989-01

Publisher: J. Am. ceram. soc.

Citation: v. 72, no. 4, 698-701

URI: https://pubs.kist.re.kr/handle/201004/7894

Appears in Collections:: KIST Publication > Article

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