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Atomic-scale crystal patterning in the oxide film by the electron beam irradiation

Authors

Gwangyeob Lee; 한경탁; Shin Ik Kim; 김영민; BAEK, SEUNG HYUB; 김도향; Hye Jung Chang

Issue Date

2019-02

Publisher

한국반도체학술대회

Citation

제 26회 한국반도체학술대회

URI

https://pubs.kist.re.kr/handle/201004/79029

Appears in Collections:

KIST Conference Paper > 2019

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