DSpace at KIST: MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정

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MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정

Title: MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정

Authors: 박경현; 변영태; 김용; 김선호; 최상삼

Keywords: MOCVD 기법; embedded 광도파로; 유효굴절률 방법; RIE(reactive ion etchin) 식각; cut-back 방법; 전파손실

Issue Date: 1993-10

Publisher: 한국물리학회 논문초록집

Citation: VOL 11, NO 2, 326-326

URI: https://pubs.kist.re.kr/handle/201004/7916

Appears in Collections:: KIST Publication > Conference Paper

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