내습성 및 기계적 성질이 우수한 산화물 투명박막 히터

Author
최지원김진상강종윤장주희김성근송현철윤정호백승협
Assignee
한국과학기술연구원
Regitration Date
2022-02-15
Registration No.
10-2364549-0000
Application Date
2020-09-17
Application No.
10-2020-0119922
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/79242
Appears in Collections:
KIST Patent > 2020
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