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Formation of SnO2-x thin film deposited by hybrid ion beam

Title
Formation of SnO2-x thin film deposited by hybrid ion beam
Authors
고석근; 조준식; 송석균; 최동수; 최원국; 정형진
Keywords
undoped tin oxide; reactive partially ionized beam; reactive ion-assisted deposition; average impinging energy; stannous tin; stannic tin
Issue Date
1996-01
Publisher
Korea-China international symposium (Peking, August, 1996)
Citation
, ?-?
URI
https://pubs.kist.re.kr/handle/201004/7930
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KIST Publication > Conference Paper
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