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직경 4“ 다이아몬드웨이퍼 합성용 7-음극 직류전원플라즈마 기상화학증착 다이아몬드합성장치

Author

이전국; 이재갑

Assignee

한국과학기술연구원

Regitration Date

2021-01-20

Registration No.

10-2207607

Application Date

2018-11-30

Application No.

10-2018-0152236

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/79348

Appears in Collections:

KIST Patent > 2018

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