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반도체 메모리 소자의 커패시터 유전막 및 그 제조 방법

Author

김성근; 이우철; 김상태; 송현철; 백승협; 에릭 라슨; 김진상; 강종윤; 크리스토퍼 빌라브스키; 염정환; 최지원

Assignee

한국과학기술연구원

Regitration Date

2020-02-27

Registration No.

10-2084608

Application Date

2018-04-25

Application No.

10-2018-0047915

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/79385

Appears in Collections:

KIST Patent > 2018

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