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Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation

Title
Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation
Authors
G.Y. Jeon; J.S. Kim; C.N. Whang; S. Im; 송종한; J.H. Song; W.K. Choi; H.K. Kim
Keywords
implantation
Issue Date
2003-05
Publisher
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
Citation
VOL B206, 409-412
URI
https://pubs.kist.re.kr/handle/201004/7942
ISSN
0168-583X
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KIST Publication > Article
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